The most significant results of the research group include:
The manufacture of microsystems equipment has been organized in Novosibirsk on the basis of AO "NZPP s OKB" and AO "NPP "Vostok". The research group have developed and implemented the modules of piezoresistive pressure sensors based on the polysilicon – dielectric – silicon structures for the temperature range of -60 f +200 °C with total measurement error of not more than 1 %. The sensors have a fundamentally new topology and are developed to be suitable for a number of pressures from 1 to 100 ATM.
The modules of the pressure sensors with temperature range up to 400 °C based on the monocrystalline silicon – dielectric – monocrystalline silicon structures have been developed for the first time in Russia. Theoretical aspects of microelectromechanical generators operation were studied and technological issues of their production were solved. Members of the research group organize of the annual EDM conference (intended for young researchers, postgraduate students and Masters’ students)
Since 2015 the members of the research group supervise the individual sections of the conference, where a number of professors from the universities of China, South Korea, Germany, USA and the universities of Moscow and Saint-Petersburg present their summary reports. Members of the Research Groups have organized 3 conferences on nanoelectronics and nanotechnologies intended for young researchers. The staff of the research group published more than 140 articles in leading Russian and foreign scientific journals.
